VTT’s nano- and microelectronics activities cover the research and development processes, e.g., for MEMS, optical MEMS, hyperspectral technology, integrated photonics, 2D materials, piezoelectric materials, superconducting technology and semiconductor technologies.

In MAGNIFIC, VTT will be responsible for the fabrication of the NOEMS devices, investigation of variability in the fabrication and partially for the FEM simulations of the devices. Concerning the materials aspects, one of the key issues is to optimize the properties and performance of nc-Si relevant to NOEMS applications and to optimize the mechanical coupling from piezoelectric AlN to the nanobeams. The devices for 5G and SATCOM applications will be fabricated and tested at VTT and shipped for further verification and packaging to UPV and DAS.