Materials for a next-generation (nano-)opto-electro-mechanical systems
Nano-opto-electro-mechanics (NOEMS) is an emerging field with unparalleled prospects for the design of efficient and low-power devices for ICT. However, to capitalize NOEMS potential, a flexible and up-scalable technology platform must be established, preferably based on current microelectronic technology. MAGNIFIC aims at filling this gap focusing on nanocrystalline silicon (nc-Si), only recently used in […]